<p style="font-size: 12px;">• High Accuracy - Controls flowrate to within ± 1% of setpoint; ideal for fluid blending and/or dispense applications<br>• Fast Response 3 seconds (typically &lt; 2 seconds for most applications)<br>• Broad application range with 2 types of control valves<br>• Wide range of flow control capability; 5 mL/min - 12000 mL/min (turndown can be as high as 100:1)<br>• All PTFE/PFA wetted part construction – insures compatibility with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)<br>• Low maintenance - modules featuring ultrasonic flowmeters with NO moving parts provide the ultimate in “uptime” (slurry module with pinch tube replacement cycle of 3 years or longer)</p>
 <h4>Applications</h4>
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 <li style="font-size: 12px;">Semiconductor CMP tools - used to precisely control the flow of chemicals and polishing slurries dispensed to the<br>polishing platen; an ideal replacement for peristaltic pump based delivery systems.</li>
 <li style="font-size: 12px;">Wet Cleaning tools – for accurate and reliable control of the blending and delivery of cleaning chemistries.</li>
 <li style="font-size: 12px;">Copper Plating tools – well suited to chemical mixing and dispensing applications.</li>
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